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SPIE Proceedings [SPIE Workshop on Nanostructure Science, Metrology, and Technology - Gaithersburg, MD (Wednesday 5 September 2001)] Nanostructure Science, Metrology, and Technology - Scan linearity: a hidden factor in SEM magnification calibration
Sicignano, Albert, Nikitin, Arkady V., Yeremin, Dmitriy Y., Sandy, Matthew, Goldburt, E. T., Peckerar, Martin C., Postek, Jr., Michael T.Volume:
4608
Year:
2002
Language:
english
DOI:
10.1117/12.437972
File:
PDF, 125 KB
english, 2002