SPIE Proceedings [SPIE Workshop on Nanostructure Science,...

  • Main
  • SPIE Proceedings [SPIE Workshop on...

SPIE Proceedings [SPIE Workshop on Nanostructure Science, Metrology, and Technology - Gaithersburg, MD (Wednesday 5 September 2001)] Nanostructure Science, Metrology, and Technology - Scan linearity: a hidden factor in SEM magnification calibration

Sicignano, Albert, Nikitin, Arkady V., Yeremin, Dmitriy Y., Sandy, Matthew, Goldburt, E. T., Peckerar, Martin C., Postek, Jr., Michael T.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4608
Year:
2002
Language:
english
DOI:
10.1117/12.437972
File:
PDF, 125 KB
english, 2002
Conversion to is in progress
Conversion to is failed