SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - MEMS safety switch for controlling critical software operations
Cooper, J. Arlin, Kidd, Marie-Elena C., Dalton, Larry J., Helvajian, Henry, Janson, Siegfried W., Laermer, FranzVolume:
4559
Year:
2001
Language:
english
DOI:
10.1117/12.443036
File:
PDF, 223 KB
english, 2001