SPIE Proceedings [SPIE Intelligent Systems and Advanced Manufacturing - Boston, MA (Sunday 28 October 2001)] Microrobotics and Microassembly III - AFM-based force microsensor for a microrobot
Fatikow, Sergej, Fahlbusch, Stephan, Nelson, Bradley J., Breguet, Jean-MarcVolume:
4568
Year:
2001
Language:
english
DOI:
10.1117/12.444116
File:
PDF, 595 KB
english, 2001