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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Electronics and Structures for MEMS II - Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications
Kalantar-Zadeh, Kourosh, Trinchi, Adrian, Wlodarski, Wojtek, Holland, Anthony, Galatsis, Kosmas, Bergmann, Neil W., Abbott, Derek, Hariz, Alex, Varadan, Vijay K.Volume:
4591
Year:
2001
Language:
english
DOI:
10.1117/12.449140
File:
PDF, 242 KB
english, 2001