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SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Friday 18 January 2002)] Nanoscience Using Laser-Solid Interactions - Erbium and phosphorus impurity doping in Si nanostructures fabricated by laser ablation
Murakami, Kouichi, Li, Changquing, Kondo, Keiichi, Yamamoto, Yoshiaki, Mitani, Sinjo, Makimura, Tetsuya, Murakami, Kouichi, Geohegan, David B., Traeger, FrankVolume:
4636
Year:
2002
Language:
english
DOI:
10.1117/12.459726
File:
PDF, 216 KB
english, 2002