SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Environmental test bench for reliability studies: influence of the temperature on rf switches with metallic membranes

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