SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Multiple-degree-of-freedom compliant mechanism possessing nearly uncoupled dynamics: experimental findings
Handley, Daniel C., Zhang, W. J., Lu, Tien-Fu, Zhao, Wei, Sood, Dinesh K., Malshe, Ajay P., Maeda, RyutaroVolume:
4936
Year:
2002
Language:
english
DOI:
10.1117/12.469672
File:
PDF, 927 KB
english, 2002