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SPIE Proceedings [SPIE Shanghai - DL tentative - Shanghai, China (Monday 1 April 1991)] International Conference on Thin Film Physics and Applications - Preferential growth in ion-beam-enhanced deposition of Ti(C,N) films

Chen, You S., Sun, Yi L., Zhang, Fu M., Mou, Hai C., Zhou, Shixun, Wang, Yongling
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Volume:
1519
Year:
1991
Language:
english
DOI:
10.1117/12.47221
File:
PDF, 255 KB
english, 1991
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