SPIE Proceedings [SPIE SPIE's 9th Annual International...

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SPIE Proceedings [SPIE SPIE's 9th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 17 March 2002)] Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology - Novel technique for fabrication of multi-layered microcoils in microelectromechanical systems (MEMS) applications

Chang, Hung-Pin, Qian, Jiangyuan, Bachman, Mark, Congdon, Philip, Li, Guann-pyng, Varadan, Vijay K.
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Volume:
4700
Year:
2002
Language:
english
DOI:
10.1117/12.475030
File:
PDF, 285 KB
english, 2002
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