SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Advanced Process Control and Automation - Computationally efficient modeling of wafer temperatures in an LPCVD furnace
He, Qinghua, Qin, S. Joe, Toprac, Anthony J., Hankinson, Matt, Ausschnitt, Christopher P.Volume:
5044
Year:
2003
Language:
english
DOI:
10.1117/12.485299
File:
PDF, 480 KB
english, 2003