SPIE Proceedings [SPIE Microelectronics, MEMS, and...

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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Photonics: Design, Technology, and Packaging - Bulk micromachined optical Fabry-Perot modulator

Jagadish, Chennupati, Chaffey, Jason P., Austin, Mike, Choquette, Kent D., Eggleton, Benjamin J., Switala, Igor, Nener, Brett D., Nugent, Keith A.
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Volume:
5277
Year:
2003
Language:
english
DOI:
10.1117/12.522028
File:
PDF, 444 KB
english, 2003
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