SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Small devices manufacturing by copper vapor laser
Gorney, Sergey G., Maher, Mary-Ann, Stewart, Harold D., Polyakov, Igor V., Nikonchuk, Mikhail O.Volume:
5715
Year:
2005
Language:
english
DOI:
10.1117/12.590092
File:
PDF, 1.27 MB
english, 2005