SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA...

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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Application of bi-layer resist on 70 nm node memory devices

Kang, Yool, Sturtevant, John L., Hong, Jin, Lee, Shi-Yong, Lee, Hyung-Rae, Ryoo, Man-Hyoung, Woo, Sang-Gyun, Cho, Han-Ku, Moon, Joo-Tae
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Volume:
5753
Year:
2005
Language:
english
DOI:
10.1117/12.599484
File:
PDF, 1.08 MB
english, 2005
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