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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Pattern fidelity in nanoimprinted films using CD-SAXS
Jones, Ronald L., Mackay, R. Scott, Soles, Christopher L., Lin, Eric K., Hu, Walter, Reano, Ronald M., Pang, Stella W., Weigand, Steven J., Keane, Denis T., Quintana, John P.Volume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.600267
File:
PDF, 747 KB
english, 2005