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SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Nanoengineering: Fabrication, Properties, Optics, and Devices II - Current imprint template commercial manufacturing capability for nanotechnology and existing semiconductor and MEMS markets
Maltabes, John G., Dobisz, Elizabeth A., Eldada, Louay A., Mackay, Scott, Cottle, RandVolume:
5931
Year:
2005
Language:
english
DOI:
10.1117/12.629499
File:
PDF, 229 KB
english, 2005