SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - Non-contact implant dose and energy metrology for advanced CMOS low-energy implants
Mehta, Narendra, Chiao, Jung-Chih, Dzurak, Andrew S., Moser, Benjamin, Varghese, Ajith, Jagadish, Chennupati, Thiel, David V., Holt, JonVolume:
6037
Year:
2005
Language:
english
DOI:
10.1117/12.639875
File:
PDF, 340 KB
english, 2005