SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 26 February 2006)] Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Lifetime characterization of capacitive power RF MEMS switches
Ziaei, Afshin, Varadan, Vijay K., Dean, Thierry, Mancuso, YvesVolume:
6172
Year:
2006
Language:
english
DOI:
10.1117/12.654483
File:
PDF, 344 KB
english, 2006