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SPIE Proceedings [SPIE ICMIT 2005: Merchatronics, MEMS, and Smart Materials - Chongqing, China (Tuesday 20 September 2005)] ICMIT 2005: Mechatronics, MEMS, and Smart Materials - The design and simulation of a practical micromachined relay
Zhang, Liuqiang, Wei, Yunlong, Chong, Kil To, Den, Dawei, Wang, Qiang, Takahashi, Takayuki, Liu, Shengping, Wang, Jianeng, Wen, Zhiyu, Li, Zushu, Jiang, Zhongwei, Choi, Jin YoungVolume:
6040
Year:
2005
Language:
english
DOI:
10.1117/12.664185
File:
PDF, 296 KB
english, 2005