SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] MEMS, MOEMS, and Micromachining II - A 2D MEMS stage for optical applications
Ataman, Caglar, Ürey, Hakan, El-Fatatry, Ayman, Petremand, Yves, Noell, Wilfried, Ürey, Hakan, Epitaux, Marc, de Rooij, Nico F.Volume:
6186
Year:
2006
Language:
english
DOI:
10.1117/12.664777
File:
PDF, 604 KB
english, 2006