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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 20 January 2007)] Photon Processing in Microelectronics and Photonics VI - Atomic layer deposition of atomic mirror for silicon
Fujimoto, T., Arnold, Craig B., Okada, Tatsuo, Shiomi, Y., Kumagai, H., Meunier, Michel, Holmes, Andrew S., Kobayashi, A., Geohegan, David B., Träger, Frank, Dubowski, Jan J.Volume:
6458
Year:
2007
Language:
english
DOI:
10.1117/12.699991
File:
PDF, 464 KB
english, 2007