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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] MEMS Adaptive Optics - Testbed for the characterization of MEM devices using a liquid crystal spatial light modulator
Wilcox, Christopher C., Olivier, Scot S., Bifano, Thomas G., Andrews, Jonathan R., Restaino, Sergio R., Kubby, Joel A., Teare, Scott W., Martinez, Ty, Payne, Don M.Volume:
6467
Year:
2007
Language:
english
DOI:
10.1117/12.703157
File:
PDF, 580 KB
english, 2007