SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - The influence of varying sputter deposition conditions on the wet chemical etch rate of AlN thin films
Ababneh, A., Becker, Thomas, Cané, Carles, Kreher, H., Seidel, H., Barker, N. Scott, Schmid, U.Volume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.721686
File:
PDF, 1.61 MB
english, 2007