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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface - The quantum limit for electrical amplifiers: Can we reach it?
Rimberg, A. J., Tadigadapa, Srinivas A., Parviz, Babak A., Xue, W. W., Ji, Z., Henning, Albert K., Pan, F., Stettenheim, J., Gilheart, T. J.Volume:
6885
Year:
2008
Language:
english
DOI:
10.1117/12.778262
File:
PDF, 909 KB
english, 2008