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SPIE Proceedings [SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 10 August 2008)] Nanoengineering: Fabrication, Properties, Optics, and Devices V - A comparative study of a-SiC x O y H z thin films grown via chemical vapor deposition for silicon photonics
Gallis, Spyros, Dobisz, Elizabeth A., Eldada, Louay A., Nikas, Vasileios, Suhag, Himani, Huang, Mengbing, Kaloyeros, Alain E.Volume:
7039
Year:
2008
Language:
english
DOI:
10.1117/12.795579
File:
PDF, 330 KB
english, 2008