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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Investigation of fluorescence on wavelength 13.5 nm of x-ray tube for nanolithographer
Chkhalo, N., Zabrodin, I., Kas'kov, I., Kluenkov, E., Pestov, A., Salashchenko, N., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.802350
File:
PDF, 157 KB
english, 2012