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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Features of evolution of implanted profiles during RTA in non-isothermal reactor
Rudakov, Valery I., Victorov, Alexander A., Denisenko, Yuri I., Mochalov, Boris V., Ovcharov, Vladimir V., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.802484
File:
PDF, 355 KB
english, 2012