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SPIE Proceedings [SPIE International Conference on Optical Instrumentation and Technology - Shanghai, China (Monday 19 October 2009)] 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications - Study of SiNx thin film character with gas flow rate in PECVD
Zhou, Zhaoying, Kang, Zhe, Li, Weizhi, Fukuda, Toshio, Seidel, Helmut, Jiang, Yadong, Li, Xinxin, Zhang, Haixia, Cui, TianhongVolume:
7510
Year:
2009
Language:
english
DOI:
10.1117/12.837502
File:
PDF, 256 KB
english, 2009