![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - Next-generation test equipment for micro-production
Gastinger, Kay, Gorecki, Christophe, Asundi, Anand K., Johnsen, Lars, Kujawinska, Malgorzata, Osten, Wolfgang, Jozwik, Michal, Zeitner, Uwe, Dannberg, Peter, Albero, Jorge, Bargiel, Sylwester, SchaeffVolume:
7718
Year:
2010
Language:
english
DOI:
10.1117/12.855087
File:
PDF, 6.02 MB
english, 2010