![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE 26th European Mask and Lithography Conference - Grenoble, France (Monday 18 January 2010)] 26th European Mask and Lithography Conference - Antisticking layers on antireflective chromium for hybrid (CNP) nanoimprint molds
Kirchner, R., Behringer, Uwe F.W., Maurer, Wilhelm, Adolphi, B., Landgraf, R., Fischer, W.-J.Volume:
7545
Year:
2010
Language:
english
DOI:
10.1117/12.865572
File:
PDF, 722 KB
english, 2010