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SPIE Proceedings [SPIE 28th Annual Technical Symposium - San Diego (Tuesday 21 August 1984)] Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II - A High-Resolution Laser Scale Interferometer
Iwaoka, Hideto, Akiyama, Koji, Lerner, Jeremy M.Volume:
503
Year:
1984
Language:
english
DOI:
10.1117/12.944824
File:
PDF, 3.79 MB
english, 1984