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SPIE Proceedings [SPIE 1985 Los Angeles Technical Symposium - Los Angeles (Monday 21 January 1985)] Advanced Applications of Ion Implantation - MeV Implantation Of N-Type Dopants Into GaAs
Thompson, Phillip E., Dietrich, Harry B., Spencer, Michael, Ingram, David C., Current, Michael I., Sadana, Devindra K.Volume:
530
Year:
1985
Language:
english
DOI:
10.1117/12.946465
File:
PDF, 2.04 MB
english, 1985