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SPIE Proceedings [SPIE 1985 Microlithography Conferences - Santa Clara (Monday 11 March 1985)] Optical Microlithography IV - Double Structured Alignment Mark For Enhanced Automatic Alignment
Ohtsuka, Hiroshi, Taguchi, Takashi, Kushibiki, Gohichi, Koikeda, Toshiaki, Stover, Harry L.Volume:
538
Year:
1985
Language:
english
DOI:
10.1117/12.947753
File:
PDF, 3.84 MB
english, 1985