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SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Excimer Laser Induced Chemical Etching Of Silicon With Halogen-Containing Gases
Sesselmann, W., Bachmann, F., Pirri, Anthony N., Piwczyk, Bernhard P.Volume:
998
Year:
1988
Language:
english
DOI:
10.1117/12.960215
File:
PDF, 494 KB
english, 1988