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SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VIII - Laser Plasma As X-Ray Source For Lithographic Imaging
Bijkerk, Fred, Louis, Eric, van Dorssen, Gert E., van der Wiel, Marnix J., Yanof, Arnold W.Volume:
1089
Year:
1989
Language:
english
DOI:
10.1117/12.968536
File:
PDF, 10.79 MB
english, 1989