X-RAY EVALUATION OF DEFORMATION BEHAVIOR OF SPUTTERED Cu...

International Journal of Modern Physics Conference Series 2012 / 01 Vol. 6

X-RAY EVALUATION OF DEFORMATION BEHAVIOR OF SPUTTERED Cu THIN FILMS UNDER TENSILE LOADING

AKINIWA, YOSHIAKI
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Volume:
6
Language:
english
Journal:
International Journal of Modern Physics: Conference Series
DOI:
10.1142/s2010194512003674
Date:
January, 2012
File:
PDF, 719 KB
english, 2012
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