Fabrication and Thermal Budget Considerations of Advanced...

ECS Journal of Solid State Science and Technology 2015 / 05 Vol. 4; Iss. 7

Fabrication and Thermal Budget Considerations of Advanced Ge and InP SOLES Substrates

Pacella, N. Y., Bulsara, M. T., Drazek, C., Guiot, E., Fitzgerald, E. A.
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Volume:
4
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0221507jss
Date:
May, 2015
File:
PDF, 1.02 MB
english, 2015
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