Reflector Influence on Rapid Heating of Minimal...

ECS Journal of Solid State Science and Technology 2016 Vol. 5; Iss. 5

Reflector Influence on Rapid Heating of Minimal Manufacturing Chemical Vapor Deposition Reactor

Li, Ning, Habuka, Hitoshi, Ishida, Yuuki, Ikeda, Shin-ichi, Hara, Shiro
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Volume:
5
Year:
2016
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0251605jss
File:
PDF, 1.08 MB
english, 2016
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