![](/img/cover-not-exists.png)
Structure Design and Stepping Characteristics Analysis of the Biaxial Piezoelectric Actuated Stage Using a Thin-Disc Piezoelectric Actuator
Mou, S.-C.Volume:
6
Language:
english
Journal:
Advances in Mechanical Engineering
DOI:
10.1155/2014/121497
Date:
February, 2015
File:
PDF, 1.32 MB
english, 2015