An Automatic System Using Mobile-Agent Software to Model...

Journal of Nanoscience and Nanotechnology 2011 / 09 Vol. 11; Iss. 9

An Automatic System Using Mobile-Agent Software to Model the Calculation Process of a Chemical Vapor Deposition Film Deposition Simulator

Takahashi, Takahiro, Fukui, Noriyuki, Arakawa, Masamoto, Funatsu, Kimito, Ema, Yoshinori
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Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.5104
Date:
September, 2011
File:
PDF, 1.01 MB
english, 2011
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