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Wideband multilayer gratings for the 17–25 nm spectral region
Yang, Xiaowei, Kozhevnikov, Igor V., Huang, Qiushi, Wang, Hongchang, Sawhney, Kawal, Wang, ZhanshanVolume:
24
Language:
english
Journal:
Optics Express
DOI:
10.1364/OE.24.015079
Date:
June, 2016
File:
PDF, 3.35 MB
english, 2016