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Surface morphology of PECVD fluorocarbon thin films from hexafluoropropylene oxide, 1,1,2,2-tetrafluoroethane, and difluoromethane
Catherine B. Labelle, Karen K. GleasonVolume:
74
Year:
1999
Language:
english
Pages:
9
DOI:
10.1002/(sici)1097-4628(19991205)74:103.0.co;2-6
File:
PDF, 277 KB
english, 1999