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Surface Characteristics of MoN x Thin Films Obtained by Reactive rf Magnetron Sputtering in UHV System
Jeong, Eunkang, Park, Juyun, Choi, Sujin, Kang, Jisoo, Kang, Yong-CheolVolume:
36
Language:
english
Journal:
Bulletin of the Korean Chemical Society
DOI:
10.1002/bkcs.10470
Date:
October, 2015
File:
PDF, 646 KB
english, 2015