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ChemInform Abstract: Selective Doped Polysilicon Growth. Effect of Carbon on the Selective Doped Silicon Film Growth.
MIENO, F., FURUMURA, Y., NISHIZAWA, T., MAEDA, M.Volume:
19
Journal:
ChemInform
DOI:
10.1002/chin.198809394
Date:
March, 1988
File:
PDF, 131 KB
1988