E-H Transition in Argon/Oxygen Inductively Coupled RF Plasmas
Wegner, Th., Küllig, C., Meichsner, J.Volume:
55
Language:
english
Journal:
Contributions to Plasma Physics
DOI:
10.1002/ctpp.201510018
Date:
December, 2015
File:
PDF, 167 KB
english, 2015