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Growth behavior and structural characteristics of TiO 2 thin films using (CpN)Ti(NMe 2 ) 2 and oxygen remote plasma
Kang, Chunho, Jeon, Heeyoung, Jang, Woochool, Song, Hyoseok, Kim, Honggi, Kim, Hyunjung, Jeon, HyeongtagVolume:
212
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201431630
Date:
March, 2015
File:
PDF, 12.21 MB
english, 2015