Damage characteristics of n-GaN thin film surfaces etched...

Physica status solidi 2013 / 11 Vol. 10; Iss. 11

Damage characteristics of n-GaN thin film surfaces etched by N 2 plasmas

Kawakami, Retsuo, Niibe, Masahito, Nakano, Yoshitaka, Shirahama, Tatsuo, Yamada, Tetsuya, Aoki, Kazuma, Takabatake, Mari, Tominaga, Kikuo, Mukai, Takashi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
10
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300190
Date:
November, 2013
File:
PDF, 486 KB
english, 2013
Conversion to is in progress
Conversion to is failed