P-21: Effects of Low Hydrogen Dielectric Film on a-IGZO TFT...

SID Symposium Digest of Technical Papers 2015 / 06 Vol. 46; Iss. 1

P-21: Effects of Low Hydrogen Dielectric Film on a-IGZO TFT Properties

Liu, Xiaodi, Yan, Liangchen, Yuan, Guangcai, Chen, Lei, Cheng, Jun, Jiang, Chunsheng, Kong, Xiangyong, Chen, Jiangbo, Liu, Wei, Shen, Wulin, Gang, Wang
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Volume:
46
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.10055
Date:
June, 2015
File:
PDF, 906 KB
english, 2015
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