Low-Temperature Deposition of SiO 2...

IETE Journal of Research 1977 / 12 Vol. 23; Iss. 12

Low-Temperature Deposition of SiO 2 Films on GaAs Using Tetraethoxysilane

Sharma, B. L., Bharti, P. L., Mukerjee, S. N., Mohan, Satish
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Volume:
23
Language:
english
Journal:
IETE Journal of Research
DOI:
10.1080/03772063.1977.11451518
Date:
December, 1977
File:
PDF, 847 KB
english, 1977
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