Statistical Characterization of Process-Induced Plasma...

Materials and Manufacturing Processes 2009 / 04 Vol. 24; Iss. 6

Statistical Characterization of Process-Induced Plasma Damage

Kim, Byungwhan, Kwon, Sang Hee, Kwon, Kwang Ho, Baek, Kyu-Ha, Lee, Jin Ho, Kim, Dong Hwan, May, Gary S.
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Volume:
24
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426910902768915
Date:
April, 2009
File:
PDF, 580 KB
english, 2009
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