Nanoscale SiC production by ballistic ion beam mixing of C/Si multilayer structures
Battistig, G, Zolnai, Z, Németh, A, Panjan, P, Menyhárd, MVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/18/185303
Date:
May, 2016
File:
PDF, 970 KB
english, 2016